National fire protection association hazard ratings nfpa. Su 8 2000 permanent epoxy negative photoresist processing guidelines for. Su8 2000 may also be exposed with ebeam or xray radiation. Material safety data sheet page 5 12 december 2001 chemical name. Safety data sheet haps free lacquer thinner version 1. The content of this material safety data sheet relates only to this product as sold and does not relate to use with any other material or in any process.
How do you get an uniform, 50nm film thickness of su 8 direct on the glass substrate. Consult the microchem su8 resist series data sheet. Material safety data sheet university of louisville. Consumer applications, industrial applications, professional applications, used by spraying. Flammability health 2 3 flammability 3 2 0 physical 1. Gigatonanoelectronic centre department of electrical and computer engineering university of waterloo 200 university avenue west waterloo, ontario, canada n2l 3g1. Resinlab, llc n109 w300 ellsworth drive, germantown, wi 53022 1800388.
Your new online msds binder is a place for you to store the material safety data sheets you need to deploy. Thinner details of the supplier of the safety data sheet sds manufacturer or supplier. Su8 is a commonly used epoxybased negative photoresist. Applied ink solutions put kayaku advanced materials to.
P20, kmpr, su8, cyclopentanone, cyclotene and ap 3000. You can contact any of our customer sales and service offices to receive a quote. Material safety data sheet page 1 10 january 2002 section 1. Material safety data sheet page 1 of 7 battery pack containing lead acid battery issue date january 2015 version 1. Su8 2000 thinner cyclopentanone make up 99 percent of the solvent. Product identifier product name standard thinners product number pth500, stt005, stt025, stt450, bls005, nrs025, nrs005 1. Schneider electric it usa formerly apc by schneider electric, apc sales and service corp. How do you get an uniform, 50nm film thickness of su8. May 16, 2014 as only a limited set of su8 resists exist in the cleanroom, to reach the desired thicknesses e. Contacto prolongado o frecuente puede producir irritacion y salpullido dermatitis. How do you get an uniform, 50nm film thickness of su8 direct on the glass substrate.
Omega international coatings pty ltd msds 5 ingestion. Urethane coatings pl thinners material safety data sheet page 2 of 6 health effects acute ingestion swallowing can cause nausea, vomiting and central nervous system depression. Klean strip paint thinner safety data sheet supersedes revision. As only a limited set of su8 resists exist in the cleanroom, to reach the desired thicknesses e. See section 11 for more detailed information on health effects and symptoms. May be you could also use a thinner layer of su8, just the size you want for your needles. The nanofabrication center information for independent. Store in cool, dry place in tightly closed containers. Xxxx details of the supplier of the safety data sheet manufacturersupplier. Processing guidelines su8 2000 photoresist is most commonly exposed with conventional uv 350400 nm radiation, although iline 365 nm is the recommended wavelength. Su8 2000 is best suited for permanent applications where it is imaged, cured and left on the device. In their official data sheet, i can not find the uv exposure time, if i make 3 microns and 100 microns, how long. Our highquality products and extensive services ensure the best possible user expierence in the market. Tikkurila is the leading paints and coatings professional in the nordic region and russia.
This material safety data sheet applies to the listed products and synonym descriptions for hazard communication purposes only. Wasser corporation 4118 b pl nw, suite b auburn, wa 98001, us. Other companies are charging thousands of dollars to set up accounts and give you access to their msds online database. See annex to the safety data sheet for additional information in the exposure scenarios. As only a limited set of su 8 resists exist in the cleanroom, to reach the desired thicknesses e. Used in a wide range of products by electronics manufacturers, kayaku advanced materials sustainable solutions. Removetake off immediately all contaminated clothing. Product cyclopentanone su 8 2000 thinner resist thinner goioioo no data available at this time comply with applicable local, state or international regulations regarding the. Consult the product material safety data sheet before working. Our msds database is an easy to use, do it yourself tool, and best of all. All purpose thinners is classified as flammable and harmful if ingested. Once you log onto our website, you will find the price and availability displayed on the product detail page.
Su8 2000 is a high contrast, epoxy based photoresist. The available thinner is cyclopentanone, which is only compatible with su 8 2000 series, of which su 8 2100 is available in the cleanroom. Su 8 2100 and su 8 2150 su 8 2000is a high contrast, epoxy based photoresist designed for micromachining and other microelectronic applications, where a thick, chemically and thermally stable image is desired. No decomposition if used according to specifications. The su 8 2000 series has better adhesion to several substrates compared to the original su 8 series. Dilution of su 8 2000 series nanolabstaffnanolab wiki. Negative refers to a photoresist whereby the parts exposed to uv become crosslinked, while the remainder of the film remains soluble and can be washed away during development.
Urethane coatings pl thinners material safety data sheet page 6 of 6 contact point contact urethane coatings pty ltd 10 powells rd, brookvale nsw 2100 b. For nanofabrication i need to have a less than 50nm film thickness of su 8 on the glass substrate. Tag solvent products mallet roadweg knights germiston 1401 republic of south africa tel. Exposure to this product may result in nausea, dizziness and lack of.
Consult product material safety data sheet before working with su8 2000. See table 1 section 9rabbit, primary skin irritation nonirritating rabbit, eye irritation severely irritating rat, inhalation safety screen, 8 hr. Webb urethane coatings make no representation as to the completeness and accuracy of the data contained in this msds. Relevant identified uses of the substance or mixture and uses advised against. Whitaker 11 material safety data sheet oil company. Identification of the substancemixture and of the companyundertaking 1. The chemical is used to remove suthinner this solvent is a flammable liquid, an irritant both on skin an eyes. Su 8 is a commonly used epoxybased negative photoresist. Immediately call a poison center or doctorphysician.
How do you get an uniform, 50nm film thickness of su8 direct. The nanofabrication center information for independent users. Composition ingredients raw materials % by weight cas number ketones n. The available thinner is cyclopentanone, which is only compatible with su8 2000 series, of which su8 2100 is available in the cleanroom. It is not necessarily all inclusive nor fully adequate in every circumstance. There are several ways to find pricing and availability for our products. Su8 2000 series is used for microfabrication of mems devices and other. Tlv threshold limit value established by acgih none of the ingredients is listed. The component materials are provided in preweighed quantities for your convenience. Lacquer thinner material safety data sheet supercedes revision. Consult the product material safety data sheet before working with su8. Material safety data sheet page 6 26 june 2001 chemical name. Physical and chemical properties physical state liquid colour colourless boiling point range 1200c 1500c.
Su8 3000 is a high contrast, epoxy based photoresist designed for micromachining. Safety data sheet klean strip paint thinner revision. With our roots in finland, we now operate in 14 countries. Su8 2000 thinner resist thinner goioioo no data available at this time comply with applicable local, state or international regulations regarding the proper disposal of this material andor containers. Unless kayaku advanced materials specifically and expressly contracts in writing with the customer for a particular intended use of our product, the choice of our product for any particular intended use is the sole and exclusive responsibility of the customer.
Material safety data sheet lacquer thinners 200 1 chemical product and company identification common name. Dilution of su 8 2000 series nanolabstaffnanolab wiki github. How do you get an uniform, 50nm film thickness of su8 direct on. Do not use in areas where vapors can accumulate and concentrate such as basements, bathrooms and small, enclosed areas. Su8 2000 series resists use cyclopentanone for the primary solvent and can be.
I spin at several speeds to 2000 rpms but the maximum thickness that i reached was um. Su 8 resists for mems and ultra thick resist processing. Material safety data sheet page 4 15 july 2003 chemical name. Containers which are opened must be carefully resealed and kept upright to prevent leakage. Technical specifications vary greatly depending on the product and are not reflected in this document. Precautions for safe handling ensure good ventilationexhaust at the workplace. Spin coating is the right technique for deposition of thin layers. Control parameters biological specimen sampling time permissible concentration basis acetone 67641 acetone urine end of shift as. Resinlab, llc n109 w300 ellsworth drive, germantown, wi 53022 18003888605.
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